Gregory W. Nyce, Jorge A. Lamboy, et al.
Organic Letters
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
Gregory W. Nyce, Jorge A. Lamboy, et al.
Organic Letters
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Macromolecules
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SPIE Photomask Technology + EUV Lithography 2012