R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
The dielectric properties are reported for nanoporous thin films of poly(methyl silsesquioxane) (MSSQ) for use as an ultralow, dielectric intermetal insulator. Direct experimental conformation is provided that the films have low dielectric constants with low loss up to 10 GHz. Low-frequency measurements are also reported.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering