Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Coassemblies of block copolymers and inorganic precursors offer a path to ordered inorganic nanostructures. In thin films, these materials combined with domain alignment provide highly robust nanoscopic templates. We report a simple path to control the morphology, scalinig, and orientation of ordered mesopores in organosilicate thin films through the coassembly of a diblock copolymer poly(styrene-b-ethylene oxide) (PS-b-PEO), and an oligomeric organosilicate precursor that is selectively miscible with PEO. Continuous films containing cylindrical or spherical pores are generated by varying the mixing composition of symmetric PS-b-PEO and an organosilicate precursor. Tuning interfacial energy at both air/film and film/substrate interfaces allows the control of cylindrical pore orientation normal to the supported film surfaces. Our method provides well-ordered mesoporous structures within organosilicate thin films that find broad applications as highly stable nanotemplates. © 2005 American Chemical Society.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting