I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
No abstract available.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
K.N. Tu
Materials Science and Engineering: A