In scanning probe microscopy, the sample under investigation has to be positioned relative to the probe with ultrahigh precision. Position control on the nanometer scale, often referred to as nanopositioning, is of critical importance for the resolution and speed of every SPM instrument.
Among the most promiment challenges in nanopositioning is the inherent tradeoff between speed and positioning accuracy. Our work addresses this issue by focusing on four conceptual areas:
- Novel micro- and nanoscale sensing technologies
- Design of novel nanopositioners
- Advanced feedback control
- Novel scan trajectories