Probe technologies

Scanning probe microscopy

Scanning probe microscopy refers to a collection of tools and techniques to visualize and manipulate matter at the nanometer scale using a physical probe that scans the sample surface. The “probe technologies” activity within our group focuses on the development of high-throughput and/or high-resolution metrology tools for nanoscale science and engineering (Fig. 1).

Application areas include data storage, memory technologies, semiconductor metrology and life sciences.

Three-dimensional topography reconstruction of nanopatterns on a silicon surface

Figure 1. A three-dimensional topography reconstruction of nanopatterns on a silicon surface obtained by a custom-designed high-speed atomic force microscope. The sample area of 4×4 µm2 was imaged in less than 1 second.