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IBM Journal of Research and Development  
Volume 44, Number 3, 2000
Directions in information technology
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The “Millipede”—More than one thousand tips for future AFM data storage - References

by P. Vettiger, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig

References

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  9. P. Vettiger, J. Brugger, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, and G. Binnig, “Ultrahigh Density, High-Data-Rate NEMS-Based AFM Data Storage System,” J. Microelectron. Eng. 46, 11­17 (1999).
  10. M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, and P. Vettiger, “Microfabrication and Parallel Operation of 5 x 5 2D AFM Cantilever Array for Data Storage and Imaging,” Proceedings of the IEEE 11th International Workshop on Micro Electro Mechanical Systems (MEMS '98), Heidelberg, Germany, January 1998, pp. 8­11; M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaraliglu, and C. Quate, “5 × 5 2D AFM Cantilever Arrays: A First Step Towards a Terabit Storage Device,” Sensors & Actuators A 73, 89­94 (1999).
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  12. G. Binnig, M. Despont, U. Drechsler, W. Häberle, M. Lutwyche, P. Vettiger, H. J. Mamin, B. W. Chui, and T. W. Kenny, “Ultra High-Density AFM Data Storage with Erase Capability,” Appl. Phys. Lett. 74, 1329­1331 (1999).
  13. G. K. Binnig, M. Despont, W. Häberle, and P. Vettiger, “Method of Forming Ultrasmall Structures and Apparatus Therefor,” filed at the U.S. Patent Office, March 17, 1999, Application No. 147865.
  14. G. K. Binnig, J. Brugger, W. Häberle, and P. Vettiger, “Investigation and/or Manipulation Device,” filed at the U.S. Patent Office, March 17, 1999, Application No. 147867.
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  17. (a) M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, and P. Vettiger, “VLSI­NEMS Chip for AFM Data Storage,” Technical Digest, 12th IEEE International Micro Electro Mechanical Systems Conference (MEMS'99), Orlando, FL, January 1999, pp. 564­569; (b) idem, “VLSI­NEMS Chip for Parallel AFM Data Storage,” Sensors & Actuators A (1999, in press).
  18. M. Lutwyche, U. Drechsler, W. Häberle, R. Widmer, H. Rothuizen, P. Vettiger, and J. Thaysen, “Planar Micromagnetic x/y/z Scanner with Five Degrees of Freedom,” Magnetic Materials, Processes, and Devices: Applications to Storage and Microelectromechanical Systems (MEMS), L. T. Romankiw, S. Krongelb, and C. H. Ahn, Eds., Vol. 98-20, The Electrochemical Society, Pennington, NJ, 1999, pp. 423­433.
  19. H. Rothuizen, U. Drechsler, G. Genolet, W. Häberle, E M. Lutwyche, R. Stutz, R. Widmer, and P. Vettiger, “Fabrication of a Micromachined Magnetic x/y/z Scanner for Parallel Scanning Probe Applications,” Proceedings of the International Conference on Micro- and Nano-Engineering (MNE '99), Rome, Italy, September 21­23, 1999, Microelectron. Eng. (in press).
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