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Volume 44, Number 3, 2000
Directions in information technology |
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Table of contents: HTML PDF ASCII |
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This article: HTML PDF ASCII |
Copyright info |
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The future of interconnection technology - References
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by
T. N. Theis |
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References
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H. Landis, P. Burke, W. Cote, W. Hill, C. Hoffman, C. Kaanta, C. Koburger, W. Lange, M. Leach, and S. Luce, Integration of Chemical-Mechanical Polishing into CMOS Integrated Circuit Manufacturing, presented at the 19th International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, 1992.
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J. G. Ryan, R. M. Geffken, N. R. Poulin, and J. R. Paraszczak, The Evolution of Interconnection Technology at IBM, IBM J. Res. Develop. 39, 371 (1995).
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D. Edelstein, J. Heidenreich, R. Goldblatt, W. Cote, C. Uzoh, N. Lustig, P. Roper, T. McDevitt, W. Motsiff, A. Simon, J. Dukovic, R. Wachnik, H. Rathore, R. Schulz, L. Su, S. Luce, and J. Slattery, Full Copper Wiring in a Sub-0.25 µm CMOS ULSI Technology, Proc. IEEE IEDM, pp. 773776 (1997).
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H. B. Bakoglu, Circuits, Interconnections, and Packaging for VLSI, Addison-Wesley Publishing Co., Inc., Reading, MA, 1990, pp. 202204.
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Ibid., p. 197.
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S. Yang, S. Ahmed, B. Arcot, R. Arghavani, P. Bai, S. Chambers, P. Charvat, R. Cotner, R. Gasser, T. Ghani, M. Hussein, C. Jan, C. Kardas, J. Maiz, P. McGregor, B. McIntyre, P. Nguyen, P. Packan, I. Post, S. Sivakumar, J. Steigerwald, M. Taylor, B. Tufts, S. Tyagi, and M. Bohr, A High Performance 180 nm Generation Logic Technology, Proc. IEEE IEDM, pp. 197200 (1998).
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Bakoglu, op. cit., p. 140.
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S. Venkatesan, A. V. Gelatos, V. Misra, B. Smith, R. Islam, J. Cope, B. Wilson, D. Tuttle, R. Cardwell, S. Anderson, M. Angyal, R. Bajaj, C. Capasso, P. Crabtree, S. Das, J. Farkas, S. Filipiak, B. Fiordalice, M. Freeman, P. V. Gilvert, M. Herrick, A. Jain, H. Kawasaki, C. King, J. Klein, T. Lii, K. Reid, T. Saaranen, C. Simpson, T. Sparks, P. Tsui, R. Venkatraman, D. Watts, E. J. Weitzman, R. Woodruff, I. Yang, N. Bhat, G. Hamilton, and Y. Yu, A High Performance 1.8V, 0.29 µm CMOS Technology with Copper Metallization, Proc. IEEE IEDM, pp. 769772 (1997).
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K. C. Saraswat and F. Mohammadi, Effect of Scaling of Interconnections on the Time Delay of VLSI Circuits, IEEE J. Solid-State Circuits ED-32, 275 (1982).
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H. B. Bakoglu and J. D. Meindl, Optimal Interconnection Circuits for VLSI, IEEE Trans. Electron Devices ED-32, 903 (1985).
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P. M. Solomon, The Need for Low Resistance Interconnects in Future High-Speed Systems, Proc. SPIE 947, 104 (1988).
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G. A. Sai-Halasz, Directions in Future High-End Processors, ICCD Digest, p. 230 (1992).
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The National Technology Roadmap for Semiconductors: Technology Needs, Semiconductor Industry Association, 1997, pp. 101102.
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T. N. Theis, Challenges in the Extension of Hierarchical Wiring Systems, Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: Materials, Processes, and Reliability, Vol. 98-6, P. C. Andricacos, J. O. Dukovic, G. S. Mathad, G. M. Oleszek, H. S. Rathore, and C. Reidsema Simpson, Eds., The Electrochemical Society, Inc., Pennington, NJ, 1999, pp. 111.
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W. E. Donath, Wire Length Distribution for Placements of Computer Logic, IBM J. Res. Develop. 25, 152 (1981).
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J. A. Davis, V. K. De, and J. D. Meindl, A Stochastic Wire-Length Distribution for Gigascale Integration (GSI)Part I: Derivation and Validation, IEEE Trans. Electron Devices 45, 580 (1998).
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Bakoglu, op. cit., p. 214.
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D. A. B. Miller, Dense Two-Dimensional Integration of Optoelectronics and Electronics for Interconnections, Heterogeneous Integration: Systems on a Chip, A. Husain and M. Fallahi, Eds., SPIE Critical Reviews of Optical Engineering, Vol. CR70, SPIE, Bellingham, WA, 1998, pp. 80109 and references therein.
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D. A. B. Miller, Physical Reasons for Optical Interconnection, Int. J. Optoelectron. 11, 155 (1997).
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A. Deutsch, H. Harrer, C. W. Surovic, G. Hellner, D. C. Edelstein, R. D. Goldblatt, G. A. Biery, N. A. Greco, D. M. Foster, E. Crabbe, L. T. Su, and P. W. Coteus, Functional High-Speed Characterization and Modeling of a Six-Layer Copper Wiring Structure and Performance Comparison with Aluminum On-Chip Interconnections, Proc. IEEE IEDM, 1998, pp. 295298.
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J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals, Princeton University Press, New York, 1995; J. D. Joannopoulos, P. R. Villeneuve, and S. Fan, Photonic Crystals: Putting a New Twist on Light, Nature 386, 143149 (1997).
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D. A. B. Miller and H. M. Ozaktas, Limit to the Bit-Rate Capacity of Electrical Interconnects from the Aspect Ratio of the System Architecture, J. Parallel Distr. Computing 41, 42 (1997).
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S. Fan, P. R. Villeneuve, J. D. Joannopoulos, and H. A. Haus, Channel Drop Tunneling Through Localized States, Phys. Rev. Lett. 80, 960 (1997).
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S. Keckler and W. Dally, Processor Coupling: Integrating Compile-Time and Run-Time Parallelism, Proceedings of the 19th Annual International Symposium on Computer Architecture, 1992, pp. 202213.
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W. J. Dally, Interconnect-Limited VLSI Architecture, Proceedings of the 1999 International Interconnect Technology Conference, San Francisco, May 2426, 1999, pp. 1517.
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http://fcrp.src.org.
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