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IBM Journal of Research and Development  
Volume 43, Number 3, 1999
Ultrathin dielectric films
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Cost-effective cleaning and high-quality thin gate oxides - References

by M. M. Heyns, T. Bearda, I. Cornelissen, S. De Gendt, R. Degraeve, G. Groeseneken, C. Kenens, D. M. Knotter, L. M. Loewenstein, P. W. Mertens, S. Mertens, M. Meuris, T. Nigam, M. Schaekers, I. Teerlinck, W. Vandervorst, R. Vos and K. Wolke.

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