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IBM Journal of Research and Development  
Volume 43, Number 3, 1999
Ultrathin dielectric films
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Key measurements of ultrathin gate dielectric reliability and in-line monitoring - References

by W. W. Abadeer, A. Bagramian, D. W. Conkle, C. W. Griffin, E. Langlois, B. F. Lloyd, R. P. Mallette, J. E. Massucco, J. M. McKenna, S. W. Mittl and P. H. Noel

References

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