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Electrochemical MicrofabricationVol. 42, No. 5, 1998
Order No. G322-0214 |
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This issue contains twelve papers on electrochemical
microfabrication: an introductory overview, nine papers on
microelectronic devices and packaging, one on magnetic
recording devices, and one on microelectromechanical systems
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Papers may be viewed by clicking on the title of interest |
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Applications of electrochemical microfabrication: An introduction
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M. Datta Guest Editor
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p. 563
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Microelectronic devices and packaging
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Damascene copper electroplating for chip interconnections
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C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni
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p. 567
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Electrochemical process for advanced package fabrication
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S. Krongelb, L. T. Romankiw, and J. A. Tornello
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p. 575
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Metallization by plating for high-performance multichip modules
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K. K. H. Wong, S. Kaja, and P. W. DeHaven
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p. 587
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Thin-film multichip module packages for high-end IBM servers
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E.D. Perfecto, A. P. Giri, R. R. Shields, H. P. Longworth, J. R. Pennacchia, and M. P. Jeanneret
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p. 597
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Electrolessly deposited diffusion barriers for microelectronics
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E. J. O'Sullivan, A. G. Schrott, M. Paunovic, C. J. Sambucetti, J. R. Marino, P. J. Bailey, S. Kaja, and K. W. Semkow
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p. 607
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Polarographic methods of monitoring addition agents in the electroplating of Sn-Pb solders
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J. Horkans
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p. 621
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Photoelectrochemical etching of semiconductors
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P. A. Kohl
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p. 629
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Electrochemical microfabrication by laser-enhanced photothermal processes
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R. J. von Gutfeld and K. G. Sheppard
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p. 639
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Microfabrication by electrochemical metal removal
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M. Datta
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p. 655
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Magnetic recording devices
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Future directions in electroplated materials for thin-film recording heads
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P. C. Andricacos and N. Robertson
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p. 671
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Microelectromechanical systems
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Integrated, variable-reluctance magnetic minimotor
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E. J. O'Sullivan, E. I. Cooper, L. T. Romankiw, K. T. Kwietniak, P. L. Trouilloud, J.Horkans, C. V. Jahnes, I. V. Babich, S. Krongelb, S. G.
Hegde, J. A. Tornello, N. C. LaBianca, J. M. Cotte, and T. J. Chainer
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p. 681
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Recent publications by IBM authors
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p. 695
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Patents
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p. 711
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