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IBM Research - Haifa

300mm

Overview

This project aims at improving wafer manufacturing at the East Fishkill fab using machine learning methods. The core of the 300mm project is an application for highlighting statistically interesting signals in trace data (Tracer). Tracer is currently deployed in the following sectors at the fab: photo lithography (LTH), reactive ion etcher (RIE), chemical mechanical polishing (CMP), epitaxial growth (EPI), metal layers (MTL), insulator deposition (INS), furnace heating (FRN), rapid thermal processing (RTP), and plating (PLT). It is a joint effort with researchers from IBM Watson research centre.

Contact: Michal Ozery-Flato (ozery@il.ibm.com)