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Behavior of sub-0.1µm compound semiconductor MOSFETs

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VLSI based on III-V semiconductors?

The high electron mobility of compound semiconductors based on group III (e.g., Al, Ga, In) and group V elements (e.g., As, P, Sb) makes them very attractive for high-frequency, high-speed applications (radio, microwave). Yet, use of these materials has not had any impact on the market of the mainstream VLSI technology (microprocessors, DRAM, logic in general).

The large financial investments poored into Si technology over the past few decades are indeed a primary cause for the insignificant presence of III-V semiconductors in VLSI: The history of technology has shown that it is hard to displace a well-established technology, even with a better one, unless the advantages of the new technology are indeed overwhelming. In addition, the natural abundance of Si and the extraordinary quality of SiO2 as 'natural' insulator are often brought forward as major additional advantages of Si over 'competing materials'.

But there are more fundamental reasons why the use of compound semiconductors would not represent much of an advantage over Si in the sub-0.1µm VLSI technology: There is no appreciable performance gain in moving from Si to, say, GaAs, as soon as large-voltage switching is considered in very small devices. DAMOCLES has been used to point out three major fundamental effects which show how electron transport over short distances behave in a quasi 'universal way', no matter which (cubic) semiconductor one considers:

  1. Carrier heating equalizes everything. Even if the applied bias is reduced from 5 to 3 to 2.5 V or below, as we move from 0.5 to 0.25, to 0.1µm and below, several considerations (mainly based on the fact that the thermal energy, kBT and the band-gaps do not scale) prevent reduction of the supplied bias much below 1 V, at least when sticking to the conventional wisdom of the present VLSI. A supply bias of about 1 V over a distance of 100nm or less is sufficient to heat-up the electrons beyond the Ohmic regime: Mobility and effective mass become meaningless concepts over most of the switching cycle of a transistor. What matters now is the density of states (DOS) of the semiconductor. As explained in detail elsewhere in these pages, the DOS determines the gross features of the scattering rates as well as the average velocity of the electrons (the DOS at a given energy being the reciprocal of the velocity averaged over equienergy shells). A look at Fig. 1 shows how the DOS at about 1 eV in a large variety of technologically significant semiconductors remains within a very narrow range: For both the conduction and the valence bands, the DOS at an energy of 1 eV above the band extrema is about 2×1021cm-3eV-1, the only exceptions being the conduction bands of In-based materials for which the satellite high-mass valleys are sufficiently high in energy.


    Conduction and valence DOS in semiconductors
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    Figure 1. Density of states for the conduction (left) and valence (right) bands for several semiconductors of technological significance. Note how the DOS at 1 eV are quantitatively very similar for both the conduction and the valence bands in all materials, with the exception of the conduction bands of In-base compounds, for which the L and X satellite valleys are sufficiently high in energy.



    The carrier-phonon scattering rates (Fig. 2) are more widely scattered, because of differences in the coupling with phonons. Yet, even in this case, a sort of 'feedback' is in place: Larger deformation potentials usually occur in energetically wide bands. But the average velocity in wide bands is larger, thus compensating somewhat the stronger scattering.


    Electron- and hole-phonon scattering rates in semiconductors
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    Figure 2. Electron-phonon (left) and hole-phonon (right) scattering rates at 300 K for those semiconductor for which proper calibration has been made.


    What this means is that while mobility, effective mass, and the general characteristics of the band extrema matter when one is concerned with phenomena occurring at an energy scale of kBT (long devices, low fields, low bias), as soon as carrier transport occurs at larger energies the picture changes: All semiconductors are alike. Visually, this is shown in Fig. 3: Carriers populate the Brillouin Zone almost uniformly when driven by high fields. It is almost impossible to tell which of the two pictures refers to Si, which one to In0.53Ga0.47As, both at a field of about 2×105 V/cm.


    Electron in the BZ (Si) Electrons in the BZ (InGaAs)

    Figure 3. Simulated distributions of electrons in k-space in Si (left) and In0.53Ga0.47As (right) at a field of 2×105 V/cm. Click on the pictures for 659×608 and 656×611 jpeg versions.


  2. Small DOS masses penalize the transconductance. The transconductance of a FET depends on the ability to control the charge density in the channel with the gate bias. Materials with low density-of-states (DOS) effective mass require a larger voltage-swing on the gate than high-DOS-mass materials, in order to change the charge density by the same amount. This contributes to depressing the transconductance of devices based on many III-V materials.
  3. Small DOS masses penalize velocity overshoot. Velocity overshoot effects depend on the gradient of the (longitudinal) field along the channel. Low DOS-mass materials exhibit smaller longitudinal field-gradients than high DOS-mass materials, for reasons related to what stated in the preceding paragraph. This net drop of longitudinal drift velocity as the gate bias increases also depresses (relatively speaking) the transconductance in III-V devices at the small distances (sub 0.1µm) over which velocity overshoot matters.

A model comparison of MOSFETs based on various semiconductors

Having preannounced our expectations based on the 'universal' features of the band-structure of cubic (diamond: Ge and Si; zinc-blend: III-V's) semiconductors, it shouldn't come as a surprise that DAMOCLES predicts [1] a remarkable similar behavior for hypothetical (model) MOSFETs based on various semiconductors. In order to appreciate the merits and limitations of the results, it is important to keep in mind the assumptions employed to perform the comparative study:

The final results of the DAMOCLES simulations are shown in Fig. 4. As anticipated, all devices modeled exhibit similar performances. As the device shrink, the differences become even less noticeable. In-based compounds appear to be the exceptions, also as expected.


Transconductance vs. gate length in semiconductors
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Figure 4. Simulated large-signal transconductance vs. metallurgical channel length for devices based on various group-IV and III-V semiconductors at 300 K (left) and liquid nitrogen temperature (right).


References

  1. M. V. Fischetti and S. E. Laux, IEEE Trans. Electron Devices 38, 650 (1991).
  2. G. Sai-Halasz, M. R. Wordeman, D. P. Kern, E. Ganin, S. Rishton, D. S. Zicherman, H. Schmidt, M. R. Polcari, H. Y. Ng, P. J. Restle, T. H. P. Chang, and R. H. Dennard, IEEE Electron Device Lett. EDL-8, 463 (1987).
  3. A. C. Callegari, P. D. Hoh, D. A. Buchanan, and D. Lacey, Appl. Phys. Lett. 54, 332 (1989).
  4. J. Batey and E. Tierney, J. Appl. Phys. 60, 3136 (1986).
  5. G. C. Fountain, S. V. Hattangady, D. J. Vitavage, R. A. Rudder, and R. J. Markunas, Electron. Lett. 24, 1134 (1988).

damoclesNO-SPAM@watson.ibm.com
(last updated: January 16, 1999)
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